EUV lithography edited by Vivek Bakshi

Material type: Text

TextPublication details: Washington SPIE 2009Description: xxvii,673p.:ill.; 25cmISBN:

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
Books	North Eastern Hill University	NANO TECHNOLOGY	621.3815 (Browse shelf(Opens below))	Available		330330

Total holds: 0

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