EUV lithography (Record no. 157908)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00288nam a22001097a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 978-0-4704-7155-5 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Edition number | 23rd. |
| Classification number | 621.3815 |
| 245 ## - TITLE STATEMENT | |
| Title | EUV lithography |
| Statement of responsibility, etc | edited by Vivek Bakshi |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Washington |
| Name of publisher | SPIE |
| Year of publication | 2009 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xxvii,673p.:ill.; |
| Dimensions | 25cm. |
| 856 ## - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | www.spie.org |
| Withdrawn status | Lost status | Damaged status | Collection code | Home library | Current library | Date acquired | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| NANO TECHNOLOGY | North Eastern Hill University | North Eastern Hill University | 10/02/2012 | 621.3815 | 330330 | Books |