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EUV lithography edited by Vivek Bakshi

Material type: TextTextPublication details: Washington SPIE 2009Description: xxvii,673p.:ill.; 25cmISBN:
  • 978-0-4704-7155-5
DDC classification:
  • 23rd. 621.3815
Online resources:
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Holdings
Item type Current library Collection Call number Status Date due Barcode Item holds
Books Books North Eastern Hill University NANO TECHNOLOGY 621.3815 (Browse shelf(Opens below)) Available 330330
Total holds: 0

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