000 00635nam a22001937a 4500
005 20250509132929.0
020 _a978-1-4822-1490-1
041 _aeng
082 _223rd.
_a621.3815
_bMIC
245 _aMicro and nanoelectronics : emerging device challenges and solutions
_cedited by Tomasz Brozek and Krzysztof Iniewski
260 _aBoca Raton
_bCRC Press
_c2015
300 _axix,363p. ;
_c24cm.
490 _aDevices, circuits and systems
650 _aMicroelectronics-Equiptment and supplies
650 _aNanoelectronics-Equipment and supplies
700 _aBrozek, Tomasz ed.
856 _uwww.crcpress.com
942 _cBK
999 _c183373
_d183372