| 000 | 00493nam a22001697a 4500 | ||
|---|---|---|---|
| 020 | _a978-3-319-06616-5 | ||
| 041 | _aeng | ||
| 082 |
_223rd ed. _a620.5 _bFLE |
||
| 100 | _aFleming, Andrew J. | ||
| 245 |
_aDesign, modeling and control of nanopositioning systems _cby Andrew J. Fleming & Kam K. Leang |
||
| 260 |
_aLondon : _bSpringer; _c2014 |
||
| 300 |
_axvi, 411p.; ill.; _c24 cm |
||
| 650 | _aNanotechnology | ||
| 700 | _aLeang, Kam K. | ||
| 856 | _uwww.springer.com | ||
| 942 | _cBK | ||
| 999 |
_c182870 _d182869 |
||