000 nam a22 7a 4500
999 _c172712
_d172712
020 _a9781461404804
041 _aeng
082 _223rd.ed.
_a621.38152 LI
100 _aLi Simon
245 _a3 D TCAD simulation for semiconductor processes devices and optoelectronics
_cSimon Li and Yue Fu
260 _aNew York
_bSpringer Science + Business
_c2012
300 _axiv, 292p. ;
_c24cm.
650 _aComputer-aided design
650 _aSemiconductors - CAD
650 _aSemiconductors - computer simulation
650 _aOptoelectronics
650 _athree- dimentional Imaging
700 _aFu, Yue
942 _cBK