000 00288nam a22001097a 4500
020 _a978-0-4704-7155-5
082 _223rd.
_a621.3815
245 _aEUV lithography
_cedited by Vivek Bakshi
260 _aWashington
_bSPIE
_c2009
300 _axxvii,673p.:ill.;
_c25cm.
856 _uwww.spie.org
999 _c157908
_d157908