TY  - BOOK
ED  - Fujita, H.
TI  - Micromachines as tools for nanotechnology
T2  - Microtechnology and mems; edited by H.Baltes and D. Liepmann 
SN  - 8181282027
U1  - 620.5 
PY  - 2003///
CY  - Berlin
PB  - Springer-Verlag
KW  - Nanotechnology
KW  - Molecular technology
ER  -