Micromachines as tools for nanotechnology 
edited by H. Fujita  
 - Berlin  Springer-Verlag  c2003  
 - xii,211p.:ill.; 24cm.- 
 - Microtechnology and mems; edited by H.Baltes and D. Liepmann  .
<br/><br/><label>ISBN: </label>8181282027 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology <br/>Molecular technology
<br/><br/><label>Dewey Class. No.: </label>620.5  / MIC