Simulation of semiconductor processes and devices  
edited by Dimitris Tsoukalas and Christos Tsamis  
 - New York   Springer - Verlag Wien   c2001 
 - v.,:ill.; 24cm. 
<br/><br/> SISPAD O1 
<br/><br/><label>ISBN: </label>3211837086  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor devices--Simulation methods <br/>Semiconductor processes--Simulation methods  
<br/><br/><label>Dewey Class. No.: </label>621.38152  / SIM