TY  - BOOK
ED  - Thompson, L. F.
ED  - Willson, C. G.
ED  - Frechet, J. M. J.
TI  - Materials for microlithography: radiation-sensitive polymers
T2  - ACS symposium series; no.266
U1  - 547.84 
PY  - 1984///
CY  - Washington
PB  - American Chemical Society
ER  -