TY  - BOOK
AU  - Fleming, Andrew J. 
AU  - Leang, Kam K. 
TI  - Design, modeling and control of nanopositioning systems
SN  - 978-3-319-06616-5
U1  - 620.5 23rd ed.
PY  - 2014///
CY  - London : 
PB  - Springer; 
KW  - Nanotechnology
UR  - www.springer.com
ER  -