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Physics and chemistry of SiO2 and the Si-SiO2 interface edited by C. Robert Helms and Bruce E. Deal

Contributor(s): Material type: TextTextSeries: Proceedings of the symposium on the physics and chemistry of SiO2 and the Si-SiO2 interface, 1981Publication details: New York Plenum Press c1988Description: xiii,556.:ill.; 26cm.-ISBN:
  • 0306430320
Subject(s): DDC classification:
  • 546.6835 HEL
Item type:
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